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Wet Process Heating and Cooling Equipment |
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The CQDR Series cascading quick dump rinser reduces water usage while utilizing top spray with bottom fill for aggressive and consistent wafer rinsing. Rapid dumping action prevents recontamination of the wafer surface.
SPECIFICATIONS:
Tank Sizes:
• Range from two 4" (100mm) cassettes to two 8" (200mm) cassettes.
Standard Features:
• Durable polypropylene or PVDF construction
• Knife edge cascading inner weir overflow
• Top spray and bottom fill manifolds
• Pneumatic dump door (requires 40-80 PSIG, 275-551 kPa of nitrogen)
• Can use with most existing dump rinse controls
• Bottom fill valve with bypass flow capability
• Clear PVC process cover
• Hot DI water compatibleOptions:
• QDRC dump rinse process controller
• PLC control
• Resistivity monitor
• Dual pneumatic dump doors
• UPDI water heater matched to your specificationMaximum Temperature:
• Polypropylene systems: 70°C (158°F)
• PVDF systems: 95°C (203°F)FEATURES AND BENEFITS:
• Improved process results: Continuous cascade rinse of residuals and contaminants. Simultaneous top spray and bottom fill action rinses wafers thoroughly.
• Rapid installation: Systems are sized to match many existing tank systems for easy retrofitting.
• Resistivity option: Reduces timed rinse cycles, saving money and increasing throughput.
OPTIONAL QDRC DUMP RINSE CONTROLThe QDRC is a self-contained dump rinse process control capable of implementing several different rinsing programs. The control is designed for panel mounting.
Four standard user selectable programming options are available. The control can sequence process steps by:
• Time
• Liquid level
• Resistivity
• Combination of the aboveCQDR DIMENSIONS
QUICK DUMP RINSER DIMENSIONS
MODEL NUMBER CARRIER CAPACITY FLANGE
(A x B)INSIDE DIMENSION DECK CUT-OUT
(E x F)LIQUID LEVEL HEIGHT OVERALL HEIGHT (H) L/L CAPACITY
GAL./(L)QDR 42 TWO - 4" (100mm) 17.0" x 13.0"
(432 x 330mm)11.5" x 7.5"
(292 x 191mm)15.5" x 11.9"
(394 x 302mm)6.0" (152mm) 13.5" (343mm) 2.2 gal (8.5 l) QDR 52 TWO - 5" (125mm) 19.5" x 13.0"
(495 x 330mm)14.0" x 7.5"
(355 x 191mm)18.0" x 11.9"
(457 x 302mm)7.0" (178mm) 14.5" (368mm) 3.2 gal (12.0 l) QDR 61 ONE - 6" (150mm) 13.5" x 13.5"
(343 x 343mm)8.0" x 8.0"
(203 x 203mm)12.0" x 12.4"
(305 x 315mm)8.0" (203mm) 15.5" (394mm) 2.2 gal (8.5 l) QDR 62 TWO - 6" (150mm) 21.5" x 13.5"
(546 x 343mm)16.0" x 8.0"
(406 x 203mm)20.0" x 12.4"
(508 x 315mm)8.0" (203mm) 15.5" (394mm) 4.4 gal (16.7 l) QDR 81 ONE - 8" (200mm) 16.5" x 16.5"
(419 x 419mm)11.0" x 11.0"
(279 x 279mm)15.0" x 15.4"
(381 x 391mm)10.0" (254mm) 17.5" (445mm) 5.2 gal (19.8 l) QDR 82
TWO - 8" (200mm) 27.0" x 16.5"
(686 x 419mm)21.5" x 11.0"
(546 x 279mm)25.5" x 15.4"
(648 x 391mm)10.0" (254mm) 17.5" (445mm) 10.2 gal (38.7 l) DOWNLOAD THE INFORMATION SHEET IN .PDF FORMAT (approximately 125KB). You will need the Adobe Acrobat program to view the information sheet. If you do not have Adobe Acrobat and would like to download it for free, press the button below.
For more information on this, or any other Process Technology product, please contact our offices (toll free within the United States or Canada) for the distributor nearest you, or visit our contact page.
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