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Wet Process Heating and Cooling Equipment |
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Applications Include:
- Nitride etch/strip: Phosphoric Acid (H3PO4) and water (H2O)
- Sulfuric (H2SO4) process
- Hydrofluoric (HF) process
- Buffered oxide etch (BOE) process (hydrofluoric and ammonium fluoride)
- Hydrochloric (HCL) process
- SC1 (ammonium hydroxide and hydrogen peroxide)
- SC2 (hydrochloric and hydrogen peroxide)
Specifications:
Tank Sizes:
- Two 4" (100mm) cassettes
- Two 5" (125mm) cassettes
- Two 6" (150mm) cassettes
- One 8" (200mm) cassette
- Two 8" (200mm) cassettes
Temperature range: Up to 180º C chemistry.
Construction:
- Unbreakable PFA inner and outer tanks.
- Inner tank sparger rails provides:
• Even chemical dispersion.
• False bottom on which carriers are set.- Inner tank walls have serrated edges to prevent whirlpools.
- The fluoropolymer mid-frame assembly is suspended from the top deck for easy leveling of the process tank. This ensures uniform cascading of the chemistry.
- Outer PFA weir for enhanced chemical and heat distribution.
- HalarÒ coated stainless steel outer structure for strength and rigidity.
- PTFE top deck assembly for added structural support.
- Air diverter located in the outer weir to prevent the formation of air pockets around the heater.
Standard features:
- Process thermocouple port
- Outer weir thermocouple port
- Liquid level port for N2 bubble sensor
- System overflow connection
- Drain connection
- Process tank leveling adjustments
- Flaretek® inlet connections for remote pump
Heater voltages available: 120 to 600 volts, single or three phase.
Options:
- Tank system can be integrated with existing control systems.
- PID or PLC temperature control.
- Integral fluoropolymer immersion heater and/or in-line heater (fluoropolymer or quartz available).
- Chemical dispensing manifold.
- Custom interfacing to match existing system.
- Manual, pneumatic or hydraulic operated lid.
- In-line filter chamber.
- PTFE condensing coil.
- Custom fitting of tank to match existing system
- Additional ports for level sensing and automatic chemical fill.
- Wafer locator nest.
Product Features and Benefits:
- Longer lasting
: Non-breakable fluoropolymer construction lasts longer than fragile quartz tank systems.- Improved process results:
False bottom provides stability for cassettes and promotes even chemical and heat distribution.- Easy heater replacement:
Optional PTFE immersion heaters are easily replaced without the need to replace the entire tank assembly. (When an externally bonded heater on a quartz tank fails, the entire tank must be removed and returned to the manufacturer.)- Excellent COO (cost of ownership): Durable PFA tanks lasts longer than comparable quartz tanks and also eliminate the need for keeping expensive spare quartz tanks in stock. Purged PTFE heaters last much longer than comparable quartz tank heaters.
- Reduced downtime: Avoid the time and expense of sending quartz tanks back to the manufacturer for repair.
- Rapid installation: Systems are sized to closely match existing quartz tanks for easy retrofitting.
- Outstanding chemical compatibility: All fluoropolymer wetted parts are compatible with virtually any chemistry.
- Rugged construction: Halar® coated stainless steel support structure for added strength and rigidity.
Halar® is a registered trademark of Ausimont U.S.A., Inc.
Flaretek® is a registered trademark of Entegris, Inc.DOWNLOAD THE INFORMATION SHEET IN .PDF FORMAT (124KB). You will need the Adobe Acrobat program to view the information sheet. If you do not have Adobe Acrobat and would like to download it for free, press the button below.
For more information on this, or any other Process Technology product, please contact our offices (toll free within the United States or Canada) for the distributor nearest you, or visit our contact page.
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