Process Technology

Wet Process Heating and Cooling Equipment

Specifications for the Hi-Flo Quartz H2OT SHOT Ultrapure Fluid Heater

HEATER Patented modular heating system using resistive heating (near infrared)
SIZES 24kW multiples up to 144kW (sizes down to 8kW available)
VOLTAGES 208 volt to 480 volt available, 50/60 Hz
TEMPERATURE LIMIT 95 degrees Celsius, depending upon operating conditions
TEMPERATURE ACCURACY 1 degree Celsius, depending on operating conditions
FLOW RATE 4 to 60 Ipm (see chart)
EFFICIENCY >99%
HEAT UP TIME >1 degree Celsius/second (see chart)
PRESSURE RATING 100 psig @ 24 degrees Celsius, 45 psig @ 90 degrees Celsius (limited by the rating of the PFA fittings)
MTBF Well in excess of 10,000 hours
TEMPERATURE REGULATING SYSTEM Distributive zero crossing SSR, powered by multi-loop PID control
TEMPERATURE SENSORS "J" type thermocouples
HEATING ELEMENT Cr-Al-Fe alloy resistance wire operating at 700 degrees Celsius
WETTED SURFACES GE type 214 quartz with 440 HP PFA interconnects
INLET/OUTLET 3/4" flare connections (48kW and higher)
1/2" flare connections (24kW)
FORCED VENTILATION None required
PURGE GAS None required
EXHAUST VENTILATION None required
STANDARD SAFETY FEATURES
  • Liquid over-temperature shutoff and alarm
  • Liquid leak detection shutoff and alarm
  • SEMI S3 compliant, 24 VAC low voltage controls
  • Low liquid flow detection shutoff
  • Heater module over-temperature shutoff and alarm
  • Flow verification/power level control
  • Redundant heater module over-temperature safety
  • Automatic cycle cool-down
  • Emergency off (EMO) with remote capabilities
  • Ground fault protection
CERTIFICATIONS
  • ETL certified and CE compliant
  • Conforms to UL 499 standards
  • Semi S2 and S3 compliant
OPTIONS
  • PLC control
  • RS 232 or RS 485 communication port
  • Capacitive style leak detection
  • Resistivity monitoring
  • Flow monitor display
  • Air cooled SSRs
  • OEM-style heater subassembly modules
  • Seismic hold-downs

Sizing chart

Performance graphs

Product cutaway illustration

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