Wet Process Heating and Cooling Equipment

QKV Series, QMax^TM In-line Chemical Heaters

The QKV Series in-line quartz heater is ruggedly designed for the most demanding chemical applications. The QKV Series heater is typically used in conjunction with a chemical bath and external pump/filter system. The heater provides high purity heated chemistry for the semiconductor, FPD, MEMS, and biomedical industries.
QKV Series Applications Include:

• SC1: Ammonium hydroxide (NH₄OH) and hydrogen peroxide (H₂O₂)
• SC2: Hydrochloric acid (HCl) and hydrogen peroxide
• Various acids such as:

• Hydrochloric
• Nitric (HNO₃)
• Sulfuric (H₂SO₄)

• Sulfuric acid and hydrogen peroxide
• Sulfuric acid and ozone (O₃)
• DI water

SPECIFICATIONS

Service: In-line chemical heater with high purity quartz and PVDF wetted surfaces for a number of common wet chemistry applications.

Heater Sizes (in watts): 1-16kW (see chart on reverse)

Temperature Range: Up to 120ºC (248°F)

Maximum Pressure: 70 PSI at 120ºC (248°F)

Voltages: 208 to 600 volts, single or three phase. Heaters larger than 9kW require three phase power.

Warranty: One year

Certifications: CE, UL and Semi S2

MTBF: In excess of four years (based on Semi E10-0600 standards)
Standard Features:

• Heater element: 2.7 micron wavelength resistive ribbon wire on quartz
• Patented dual flow path design
• Electrical connections: 78" (2m) multi-conductor cables
• Vertical installation only
• "K" type thermocouples for fluid and element over-temperature alarms
• Bimetal switch set at 105°C (221°F) for backup system over-temperature alarm
• Grounded construction
• More than 99% efficient
• +/- 0.5°C (1°F)
• Insulation: silicone closed cell foam

Fluid Connections:

• 1/2-inch (12mm) Flaretek® connections standard
• Optional 3/8-inch (9mm) Flaretek®, 3/8-inch (9mm) or 1/2-inch (12mm) Super 300 Type Pillar® connections

Product Features and Benefits:

• Faster heatup: Single heater sizes up to 16 kW.
• Exceptionally clean performance: High purity quartz and PVDF construction. Cleanroom assembled and tested to the highest manufacturing standards.
• Long heater life for reduced cost of ownership (COO): Proven element design ensures exceptionally long heater life.
• Excellent temperature stability: Fast reacting element enables accurate control of the process temperature.
Options:

• Fluoropolymer coated outer housing
• Quartz turbulator for low flow, viscous, or temperature sensitive applications
• Capacitive style liquid level verification
• PID temperature control module

• +/- .5°C (1°F) control steady state
• Membrane style switch panel with countdown process timer.
• Low voltage panel mount control with separate power module.
• Safety device monitoring and alarm display. Monitors flow, process temperature, and over-temperature sensors.

• PLC temperature control
• Drain connection (1/4-inch (6mm) Flaretek® or Super 300 Type Pillar®)

Super 300 Type Pillar® is a registered trademark of Nippon Pillar Packing Co. LTD. Flaretek® is a registered trademark of Entegris, Inc.

DOWNLOAD THE INFORMATION SHEET IN .PDF FORMAT (130KB)
DOWNLOAD THE INLINE CHEMICAL HEATER SPECIFICATION SHEET (69KB)
You will need the Adobe Acrobat program to view the information sheet. If you do not have Adobe Acrobat and would like to download it for free, press the button below.

For more information on this, or any other Process Technology product, please contact our offices (toll free within the United States or Canada) for the distributor nearest you, or visit our contact page.

U.S./Canada: 800-621-1998
Worldwide: 440-974-1300

Wet Process Heating and Cooling Equipment

QKV Series, QMaxTM In-line Chemical Heaters

U.S./Canada: 800-621-1998 Worldwide: 440-974-1300

QKV Series, QMax^TM In-line Chemical Heaters

U.S./Canada: 800-621-1998
Worldwide: 440-974-1300